Performance limiting surface defects in SiC epitaxial p-n junction diodes
نویسندگان
چکیده
منابع مشابه
Germanium In Situ Doped Epitaxial Growth on Si for High-Performance n/p-Junction Diode
We demonstrate an abrupt and box-shaped n/p junction in Ge with a high level of activation of n-type-dopant phosphorus (P) using in situ doping during epitaxial growth. The temperature dependence of dopant activation was investigated associated with the shallower and abrupt junction formation. In addition, we have fabricated high-performance Ge n/p-junction diodes at 400 ◦C–600 ◦C, based on the...
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Effect of Low Pressure on Surface Roughness and Morphological Defects of 4H-SiC Epitaxial Layers
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ژورنال
عنوان ژورنال: IEEE Transactions on Electron Devices
سال: 1999
ISSN: 0018-9383
DOI: 10.1109/16.748864